In one embodiment, a wafer-handling robot in a wafer processing system is automatically calibrated by determining an orientation of the robot relative to a chassis of the wafer processing system, determining hand-off coordinates of a load port in the wafer processing system, and determining hand-off coordinates of a load lock in the wafer processing system. Also disclosed is a calibration fixture for automatically calibrating the wafer-handling robot to the load port.

 
Web www.patentalert.com

< Electrical charging system, electrical charging controlling method, robot apparatus, electrical charging device, electrical charging controlling program and recording medium

< Speech interface for an automated endoscopic system

> Articulated bending mechanism for legged mobile robot and the legged mobile robot

> System and method for performing simultaneous precision die bond of photonic components onto a single substrate

~ 00201