A rule-based OPC evaluating method and a simulation-based OPC model evaluating
method for accurately evaluating line width controllability are disclosed. Mask
pattern design data about an evaluation-use mask are input to rule-based OPC to
obtain correction data about the mask pattern on the evaluation-use mask. An evaluation-use
wafer is fabricated based on the correction data thus acquired. Gate patterns on
the evaluation-use wafer are measured for size. Based on a simulation-based OPC
model having undergone process calibration, simulation data are output corresponding
to all gate patterns on the evaluation-use wafer. The measured data about the evaluation-use
gate patterns are compared with the simulation data, whereby the rule-based OPC
is evaluated.
