A method comprises depositing an organic material on a substrate;
depositing additional material different from the organic material after
depositing the organic material; and removing the organic material with a
compressed fluid. Also disclosed is a method comprising: providing an
organic layer on a substrate; after providing the organic layer,
providing one or more layers of a material different than the organic
material of the organic layer; removing the organic layer with a
compressed fluid; and providing an anti-stiction agent with a compressed
fluid to material remaining after removal of the organic layer.
