A center robot is fixed approximately in a central portion of a process
part. A coating unit, a drying unit, a transfer unit, a peeling unit, a
film supplying unit and a reversing unit are arranged around the center
robot. The center robot comprises a hand-for-substrate and a
hand-for-film which are allowed to directly access the respective units.
Within a process part, the center robot transports a sheet film and/or a
substrate between the coating unit, the drying unit, the transfer unit
and the film supplying unit, and a thin film is formed on the substrate
using the sheet film.
