A semiconductor cooling device includes a cold plate for cooling a semiconductor
element, a condenser, and an inverter-controlled refrigerant pump, all of which
are fluid connected in series with each other to define a refrigerating cycle.
The semiconductor cooling device also includes a fan for cooling the condenser,
a temperature detector disposed in proximity to the semiconductor element, and
a controller for controlling the refrigerant pump and the fan. The controller controls
the number of revolutions of the refrigerant pump and that of the fan depending
on a value measured by the temperature detector.
