Methods for producing waveguides are disclosed. In one embodiment, a waveguide
is produced by depositing a first metal layer on a substrate, depositing a sacrificial
material on the first metal layer, depositing a second metal layer on the sacrificial
material, the second metal layer contacting the first metal layer and defining
therebetween a cavity for the waveguide, the cavity filled with the sacrificial
material, and removing the sacrificial material.
