An apparatus and method for mapping film thickness of textured polycrystalline
thin films. Multiple sample films of known thicknesses are provided, and each is
irradiated by x-ray at a measurement point to generate a diffraction image that
captures a plurality of diffraction arcs. Texture information (i.e., pole densities)
of each sample film is calculated based on multiple incomplete pole figures collected
from the diffraction image and used to correct the x-ray diffraction intensities
obtained from such sample film. Corrected and integrated diffraction intensities
of the sample films are then correlated to respective known film thicknesses of
such films, and the correlation so determined can be used to map the film thickness
of a textured polycrystalline thin film of unknown thickness, based on the corrected
and integrated diffraction intensity calculated for such thin film.
