A laser process system with multiple, independently steerable laser beamlets
and
including a laser and beam shaper for generating a shaped source beam, a splitter
stage for generating a plurality of beamlets from the shaped source beam, a beamlet
controller including an independently steerable beamlet steering mirror for and
corresponding to each beamlet for independently directing the corresponding beamlet,
a mirror controller for controlling each beamlet steering mirror, and an optical
path including a scanning lens for directing each steered beamlet to a target area
of a workpiece. Each beamlet steering mirror is a multi-axis micro-electro-mechanical
mirror and the system further includes a beam dump located in the optical path
for intercepting a beamlet steered into the beam dump by the corresponding beamlet
steering mirror.
