Disclosed is an MEMS variable optical attenuator comprising a substrate
having a planar surface, optical fibers having an optical signal transmitting end
and an optical signal receiving end, respectively, coaxially arranged on the substrate,
a micro-electric actuator arranged on the substrate for providing a driving stroke
along a direction perpendicular to an optical axis of the optical beam, at least
one lever structure arranged on the substrate for receiving the driving stroke
of the micro-electric actuator at a first end thereof and transferring an amplified
displacement distance to an optical shutter through a second end thereof, an optical
shutter arranged on the substrate and connected to the second end of the lever
structure so as to be moved by the amplified displacement distance, thereby being
displaced to an attenuation position of the optical beam.
