Semiconductor integrated circuit device including semiconductor memory with tester circuit capable of analyzing redundancy repair

   
   

Following data writing into a memory cell array according to an internal address signal, the data read out from each memory cell is compared with expected value data in a readout operation. An associated memory cell array and a test block are provided corresponding to each sub memory cell array. Each test block includes a replacement determination unit for respective combinations of a sequence to replace a memory cell row and a memory cell column in order. Each replacement determination unit writes a defective address only when a defective memory cell having an address differing from the row and column addresses of a defective memory cell already stored is found.

 
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