A multi-layer capacitor is highly downsized and increased in capacity. A method
for manufacturing the multi-layer capacitor includes, in the same vacuum chamber,
forming a dielectric layer, a surface of the dielectric layer, forming a pattern
in a metal electrode, forming the metal electrode on the dielectric layer, and
treating a surface of the metal electrode. In this method, etching of the dielectric
layer flattens a recessed part generated by an electrical insulation part.
