A method of inspecting for defects in the shape of an object, using an inspected
image obtained from an object to be inspected, comprising the steps of: setting
a reference image of a reference model for determining the defect in shape of the
object to be inspected; obtaining the imaged image from the object to be inspected;
comparing the corresponding whole or local area of the reference image with the
inspected image in terms of brightness; and determining as to whether or not the
object is defective in shape. According to the present invention, the shape defect
inspection does not rely upon the skilled person's experience, can reduce time
required for inspection, and can be made for the whole area of the inspection area.
