A mass flow meter employs discrete chip-type temperature sensors to sense a fluid
flow rate. The sensor can be a semiconductor chip such as SiC or silicon, or thin
film tungsten on an AlN substrate. The sensors can be distributed symmetrically
with respect to the conduit through which the fluid flows, and can be connected
in a four-sensor bridge circuit for accurate flow rate monitoring. An output from
the mass flow meter can be used to control the fluid flow.
