Light generation apparatus, exposure apparatus, and device manufacturing method

   
   

A light generation apparatus is capable of widely changing the intensity of generated light. The light generation apparatus includes an X-ray source, a high-voltage generation circuit, and a CPU. The high-voltage generation circuit has a plurality of capacitors, and a plurality of switches, which are arranged on the charging and discharging paths of the capacitors. The CPU controls the switches to switch a capacitor for supplying electric energy to the X-ray point source, thereby changing electric energy supplied to the X-ray point source.

 
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