An optical inspection unit inspects a surface of an object under inspection optically.
A processing unit detects defects on the surface of the object under inspection
and their features according to inspection results from the optical inspection
unit, detects positions of the detected defects on the surface of the object under
inspection, and classifies the detected defects according to their features. The
processing unit selects the defects, on which a X-ray analysis should be performed,
according to predetermined conditions about the features or the classification
results of the defects. Alternatively, the processing unit displays the positions
and the classification results of the defects, and an operator picks the defects,
on which the X-ray analysis should be performed. A X-ray inspection unit performs
the X-ray analyses on the selected or picked defects.
