A microvalve (10) for controlling fluid flow, including a body portion
(14)
having at least one opening (18) formed therein, a shutter (12) located
adjacent to and substantially parallel with the body portion, and a drive mechanism
(20, 22) for causing the shutter to pivot with resect to the body portion
so that the shutter is brought into and out of alignment with the opening of the
body portion, wherein the microvalve is in a closed position and an open position, respectively.
