The invention provides a method for manufacturing a piezoelectric element including
a coating step of coating a substrate with a coating liquid for forming the piezoelectric
element thereby forming a coated film, a drying step of drying the coated film,
a preliminary sintering step of preliminarily sintering the coated film thereby
forming an oxide film, a final sintering step of finally sintering the oxide film
thereby forming a piezoelectric film, and a cooling step of cooling the piezoelectric
film, wherein the steps are executed in the presence of a moisture-containing gas;
in the coating step the substrate has a temperature equal to or less than 50
C. and the moisture-containing gas has a relative humidity of 60% RH or less at
25 C.; in the drying step, the substrate has a temperature equal to or less
than 200 C. and the relative humidity is 10 to 70% RH; in the preliminary
sintering step the substrate has a temperature of 200 to 450 C. and the relative
humidity is 70 to 100% RH; in the final sintering step the substrate has a temperature
of 500 to 800 C. and the relative humidity is 70 to 100% RH.
