Provided is a novel chamber effluent monitoring system. The system comprises
a chamber having an exhaust line connected thereto. The exhaust line includes a
sample region, wherein substantially all of a chamber effluent also passes through
the sample region. The system further comprises an absorption spectroscopy measurement
system for detecting a gas phase molecular species. The measurement system comprises
a light source and a main detector in optical communication with the sample region
through one or more light transmissive window. The light source directs a light
beam into the sample region through one of the one or more light transmissive window.
The light beam passes through the sample region and exits the sample region through
one of the one or more light transmissive window. The main detector responds to
the light beam exiting the sample region. The system allows for in situ measurement
of molecular gas impurities in a chamber effluent, and in particular, in the effluent
from a semiconductor processing chamber. Particular applicability is found in semiconductor
manufacturing process control and hazardous gas leak detection.
