A thin film transistor array fabricated on a polyimide substrate forms a backplane
for an electronic display. The thin film transistor array incorporates gate electrodes,
a gate insulating layer, semiconducting channel layers deposited on top of the
gate insulating layer, a source electrode, a drain electrode and a contact layer
beneath each of the source and drain electrodes and in contact with at least the
channel layer. An insulating encapsulation layer is positioned on the channel layer.
The layers are deposited onto the polyimide substrate using PECVD and etched using
photolithography to form the backplane.
