The present invention provides a magnetic neutral line plasma discharge processing
system that makes it no longer necessary to use an insulator wall in the vacuum
chamber and metal such as stainless steel may alternatively be used, while maintaining
the features including both time/space and space controllability relative to the
size and the location of low pressure, low temperature and high density plasma
to be generated. Thus, the cost of the system can be reduced remarkably. As a result,
the scope of application of discharge plasma systems can be broadened. A magnetic
neutral line plasma discharge processing system according to the invention comprises
a magnetic field generating means for generating a magnetic neutral line formed
by a succession of zero magnetic field positions existing continuously in the vacuum
chamber and corresponding to the shape and the size of the object of processing
and an electric field generating means for generating discharge plasma in a space
containing the magnetic neutral line by applying a radio frequency electric field
to the magnetic neutral line generated in the vacuum chamber by said magnetic field
generating means at an inclined angle, said inclined angle possibly being rectangle.
