Film-forming device, liquid material filling method thereof, device manufacturing method, device manufacturing apparatus, and device

   
   

A liquid material is filled into a head of a film-forming device. The head is used for discharging liquid drops. A vibration-applying means for applying vibrations to the liquid material filling the liquid material is included.

Um material líquido é enchido em uma cabeça de um dispositivo film-forming. A cabeça é usada descarregando gotas líquidas. Vibração-aplicar meios para aplicar vibrações ao material líquido que enche o material líquido é incluído.

 
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