Stage device, method of controlling same, and exposure apparatus

   
   

A fine (short-stroke) stage is mounted on an XY slider and is capable of being moved over a minute range in the XY directions. Though the XY slider is moved along the X direction by a Y guide bar, movement along the X direction is decided by an X guide bar. If the relative angle between the direction of the X guide bar and the surface of a bar mirror of the fine stage is represented by .alpha., then the X guide bar will be moved by .alpha.x when the XY slider has been moved by x along the X direction by the Y guide bar. After the fine stage is thus positioned, the relative positional relationship between the fine stage and the XY slider is held constant.

 
Web www.patentalert.com

< Projection exposure apparatus having aberration measurement device

< Display device

> Polarization beam splitter and method of producing the same

> Scanning type display optical system and scanning type image display apparatus

~ 00164