Method of measuring small pads on a substrate

   
   

A method of measuring a small area on a substrate with an ellipsometer, comprising orienting a substrate with respect to the ellipsometer such that an elliptical light spot produced by the ellipsometer fits diagonally within the test area. Then measuring the surface properties of the substrate within the test area with the ellipsometer.

Un método de medir un área pequeña en un substrato con un ellipsometer, abarcando orientando un substrato con respecto al ellipsometer tales que un punto ligero elíptico producido por los ajustes del ellipsometer diagonalmente dentro de la zona de pruebas. Entonces medir las características superficiales del substrato dentro de la zona de pruebas con el ellipsometer.

 
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