Process for preparing silica or silica-based thick vitreous films according to the sol-gel technique and thick films thereby obtained

   
   

A sol-gel process allowing preparation, on a substrate, of glassy films of silicon oxide or mixed oxides based on silicon oxide, of thickness above 1 micrometer, generally between 2 and 20 micrometers and characterized by absence of defects, that turn out to be particularly suitable as waveguides in flat optical devices.

Uma preparação reservando process do solenóide-sol-gel, em uma carcaça, de películas glassy do óxido do silicone ou dos óxidos misturados baseado no óxido do silicone, da espessura acima de 1 micrômetro, geralmente entre 2 e 20 micrômetros e caracterizado pela ausência dos defeitos, que giram para fora para ser particularmente apropriados como os waveguides em dispositivos óticos lisos.

 
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