Binder-enriched silicalite adhesion layer and apparatus for fabricating the same

   
   

The adhesion of overlying layers to a silicalite-plus-binder dielectric layer is enhanced by forming a layer that includes the binder in a higher concentration. The overlying layer, e.g., silicon dioxide, silicon carbide or silicon nitride, adheres more tightly to the higher-concentration binder layer. Although the presence of the higher-concentration binder layer may increase the dielectric constant of the overall silicalite-plus-binder stack, the increase is generally minimal.

 
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