A method and an apparatus for removing a liquid, i.e. a wet processing
liquid, from at least one surface of at least one substrate is disclosed.
A liquid is supplied on a surface of substrate. Simultaneously or
thereafter the liquid or the substrate is locally heated to thereby reduce
the surface tension of said liquid. By doing so, at least locally a
sharply defined liquid-ambient boundary is created. According to the
invention, the substrate is subjected to a rotary movement at a speed to
guide said liquid-ambient boundary over the surface of the substrate
thereby removing said liquid from said surface.
