Micro-electromechanical devices and methods of manufacture

   
   

Micro-eletromechanical devices, substrate assemblies from which the devices can be manufactured, and methods to manufacture the devices are disclosed. The invention combines the advantages of conventional surface and bulk micromachining processes using a sacrificial layer to create an integrated micro-electromechanical system (MIEMS) technology that provides high performance, high yield, and manufacturing tolerance. The devices manufactured according to the present invention include, but are not limited to, pressure sensors, vibration sensors, accelerometers, gas or liquid pumps, flow sensor, resonant devices, and infrared detectors.

Os Micro-eletromechanical dispositivos, os conjuntos da carcaça de que os dispositivos pode ser manufactured, e os métodos para manufaturar os dispositivos são divulgados. A invenção combina as vantagens de processos micromachining convencionais da superfície e do volume usando uma camada sacrificial criar uma tecnologia micro-eletromecânica integrada do sistema (MIEMS) que forneça o desempenho elevado, o rendimento elevado, e a tolerância do manufacturing. Os dispositivos manufaturados de acordo com a invenção atual incluem, mas não são limitados a, sensores da pressão, sensores da vibração, acelerómetros, bombas do gás ou do líquido, sensor de fluxo, dispositivos resonant, e os detetores infravermelhos.

 
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