A microelectromechanical systems (MEMS) element and a MEMS optical switch
are described. The MEMS element comprises a crystalline and moveable
element is moveably attached to the substrate. The moveable element
includes a perpendicular portion oriented substantially perpendicular to a
plane of the substrate. The crystal structure of the perpendicular portion
and substrate are substantially similar. The moveable element is capable
of motion substantially constrained to a plane oriented substantially
perpendicular to a plane of the substrate. In at least one position, a
part of a perpendicular portion of the moveable element projects beyond a
surface of the substrate. The moveable element may be retained in place by
a latch. An array of such structures can be implemented to work as an
optical switch. The optical switch may comprise a crystalline substrate
and one or more moveable elements moveably attached to the substrate. The
various embodiments provide for a robust and reliable MEMS elements that
may be simply fabricated and densely packed.
