Diamondoid-containing materials in microelectronics

   
   

Novel uses of diamondoid-containing materials in the field of microelectronics are disclosed. Embodiments include, but are not limited to, thermally conductive films in integrated circuit packaging, low-k dielectric layers in integrated circuit multilevel interconnects, thermally conductive adhesive films, thermally conductive films in thermoelectric cooling devices, passivation films for integrated circuit devices (ICs), and field emission cathodes. The diamondoids employed in the present invention may be selected from lower diamondoids, as well as the newly provided higher diamondoids, including substituted and unsubstituted diamondoids. The higher diamondoids include tetramantane, pentamantane, hexamantane, heptamantane, octamantane, nonamantane, decamantane, and undecamantane. The diamondoid-containing material may be fabricated as a diamondoid-containing polymer, a diamondoid-containing sintered ceramic, a diamondoid ceramic composite, a CVD diamondoid film, a self-assembled diamondoid film, and a diamondoid-fullerene composite.

Het nieuwe gebruik van diamondoid-bevattende materialen op het gebied van micro-elektronica wordt onthuld. De belichamingen omvatten, maar zijn niet beperkt tot, thermaal geleidende films in de verpakking van geïntegreerde schakelingen, laag-k de diëlektrische lagen in geïntegreerde schakeling op verscheidene niveaus, thermaal geleidende zelfklevende films, thermaal geleidende films in thermo-elektrische koelapparaten, passiveringsfilms voor de apparaten van geïntegreerde schakelingen (ICs), en de kathoden van de gebiedsemissie onderling verbindt. Diamondoids die in de onderhavige uitvinding wordt aangewend kunnen uit lagere diamondoids, evenals onlangs verstrekte hogere diamondoids, met inbegrip van gesubstitueerde en unsubstituted diamondoids worden geselecteerd. Hogere diamondoids omvatten tetramantane, pentamantane, hexamantane, heptamantane, octamantane, nonamantane, decamantane, en undecamantane. Het diamondoid-bevattend materiaal kan als diamondoid-bevattend polymeer, diamondoid-bevat gesinterde ceramisch, diamondoid ceramische samenstelling, diamondoidfilm van CVD, zelf-geassembleerde diamondoidfilm, en diamondoid-fullerenesamenstelling worden vervaardigd.

 
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