Methods of producing an electromechanical circuit element are described. A
lower structure having lower support structures and a lower electrically
conductive element is provided. A nanotube ribbon (or other
electromechanically responsive element) is formed on an upper surface of
the lower structure so as to contact the lower support structures. An
upper structure is provided over the nanotube ribbon. The upper structure
includes upper support structures and an upper electrically conductive
element. In some arrangements, the upper and lower electrically conductive
elements are in vertical alignment, but in some arrangements they are not.
