Method and apparatus for user guidance in optical inspection and measurement of thin films and substrates, and software therefore

   
   

A method, apparatus, and software for guiding users during optical inspection and measurement of coated and noncoated substrates with an optical measurement system is provided. The optical measurement system incorporates an integrated recipe and data browser with sortable features to facilitate the optical inspection and measurement by the user.

Un método, un aparato, y un software para los usuarios de guía durante la inspección y la medida ópticas de revestido y noncoated los substratos con un sistema óptico de la medida se proporciona. El sistema óptico de la medida incorpora un browser integrado de la receta y de los datos con las características sortable para facilitar la inspección y la medida ópticas del usuario.

 
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