Intra-cavity beam homogenizer resonator

   
   

An excimer or molecular fluorine laser system includes a discharge chamber filled with a gas mixture, multiple electrodes within the discharge chamber and connected to the discharge circuit for energizing the gas mixture, a resonant cavity including the discharge chamber for generating a laser beam, and an intracavity homogenizer for homogenizing an intensity profile of the laser beam generated in the resonator. The intracavity homogenizer may include each of a first bi-prism and a second bi-prism disposed at opposite ends of the resonant cavity and having the discharge chamber disposed therebetween. In this case, optical axes of the first bi-prism and the second bi-prism are each at least substantially parallel to the optical axis of the laser beam.

Um excimer ou um sistema molecular do laser do fluorine incluem uma câmara da descarga enchida com uma mistura do gás, uns elétrodos múltiplos dentro da câmara da descarga e conectada ao circuito da descarga para energizar a mistura do gás, uma cavidade resonant including a câmara da descarga para gerar um feixe de laser, e um homogenizer do intracavity para homogenizing um perfil da intensidade do feixe de laser gerado no ressonador. O homogenizer do intracavity pode incluir cada um de um primeiro bi-prism e um segundo bi-prism disposto em fins opostos da cavidade resonant e de ter a câmara da descarga disposta therebetween. Neste caso, os machados óticos do primeiro bi-prism e o segundo bi-prism são cada um ao menos substancialmente paralela à linha central ótica do feixe de laser.

 
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