An exemplary method for making a micropump device is disclosed as providing
inter alia a substrate (300), an inlet opening (310), and outlet opening
(340), a pump chamber (370) and flapper valves (350, 360). The fluid inlet
channel (310) is generally configured to flow a fluid through/around the
inlet opening flapper valve (350). The outlet opening flapper valve (360)
generally provides means for preventing or otherwise decreasing the
incidence of outlet fluid re-entering either the pumping cavity (370)
and/or the fluid inlet channel (310). Accordingly, the reduction of
backflow generally tends to enhance overall pumping efficiency. Disclosed
features and specifications may be variously controlled, adapted or
otherwise optionally modified to improve micropump operation in any
microfluidic application. Exemplary embodiments of the present invention
representatively provide for substantially self-priming gas/liquid
micropumps that may be readily integrated with existing portable ceramic
technologies for the improvement of device package form factors, weights
and other manufacturing and/or device performance metrics.
