Methods for making thin film multiple layered three-dimensional devices
using two-dimensional MEMS techniques for use in a variety of applications
including endovascular, endolumenal, intracranial, and intraocular medical
applications. In the general method, a thin film first layer of the device
material is deposited over a release layer which in turn is deposited on a
substrate. An other release layer is deposited on the first device layer,
with portions of the other release layer removed, leaving a pattern in the
first device layer. In a similar manner a second layer of device material
is formed in a pattern overlying the first device layer with portions of
the two layers joined together leaving a portion of the release layer
between them. The two release layers are removed and the first and second
layers of the device material are formed into a three-dimensional shape
suitable for the desired end-use application.
