An integrated tunable resonator for radio includes an RF resonator having a
micromechanical tunable capacitor with high Q- (quality factor) value. A
first conducting layer (4) forms the first capacitor electrode (8), and/or
the electrodes (9) to create the electrostatic force on a movable
micromechanical structure (2), and the interconnecting wire (10) between
the inductor coil (1) and the capacitor electrode. This arrangement with
the use of a dielectric insulating layer provides a substantial
improvement to the linearity, power consumption, occupation space and
reliability of RF resonator circuits.
