A switch arrangement includes a MEMS switch connected to a voltage supply
system. The MEMS switch has a mechanical resonant frequency. The voltage
supply system has a capability for supplying a voltage with a frequency
corresponding to the mechanical resonant frequency of the switch. A method
includes providing a MEMS switch including a movable part which has a
mechanical resonant frequency, and then supplying an AC voltage to the
movable part. The AC voltage has a frequency corresponding to the
mechanical resonant frequency of the movable part.
