A method is provided for fabricating microelectromechanically tunable
vertical-cavity surface-emitting lasers with precise lateral and vertical
dimensional control. Microelectromechanical tunable vertical cavity
surface emitting laser structures are also provided which include a
suspended membrane structure made of a dielectric/metal membrane or metal
film that supports a cavity-tuning reflective dielectric film stack while
being anchored at the perimeter by metal support post(s). Tuning is
achieved by translational movement of the cavity-tuning reflective
dielectric film stack in a controlled electrostatic field. The current
invention deals with the intracavity electrical contacts for current
injection for this type of MEM-tunable VCSEL's. The current invention also
includes various mechanisms to control the current injection profile so as
to ensure single mode operation throughout the tuning range of the
MEM-tunable VCSEL's.
