An apparatus for supercritical processing of multiple workpieces comprises
a transfer module, first and second supercritical processing modules, and
a robot. The transfer module includes an entrance. The first and second
supercritical processing modules are coupled to the transfer module. The
robot is preferably located with the transfer module. In operation, the
robot transfers a first workpiece from the entrance of the transfer module
to the first supercritical processing module. The robot then transfers a
second workpiece from the entrance to the second supercritical processing
module. After the workpieces have been processed, the robot returns the
first and second workpieces to the entrance of the transfer module.
Alternatively, the apparatus includes additional supercritical processing
modules coupled to the transfer module.
