A collection of silicon oxide nanoparticles have an average diameter from
about 5 nm to about 100 nm. The collection of silicon oxide nanoparticles
effectively include no particles with a diameter greater than about four
times the average diameter. The particles generally have a spherical
morphology. Methods for producing the nanoparticles involve laser
pyrolysis. The silicon oxide nanoparticles are effective for the
production of improved polishing compositions including compositions
useful for chemical-mechanical polishing.
