The present invention relates to an excimer laser comprising a charging
circuit including a parallel connection of a storage capacitor (C.sub.B)
with a series connection of a reoscillation inductance (L.sub.B), a
charging inductance (L.sub.L) and a firing device (Z) for firing the
excimer laser, wherein the storage capacitor (C.sub.B) has at least a
terminal for connecting a power supply (U.sub.L), a peaking capacitor
(C.sub.P) connected in parallel with the charging inductance (L.sub.L), a
discharge path including two opposed electrodes (E1, E2), connected in
parallel with the peaking capacitor (C.sub.P), and a driving device for
driving the firing device (Z), wherein the firing device (Z) is formed as
a MOSFET array. The invention also relates to a corresponding method of
operating such an excimer laser.
