The present invention discloses a type of nanostructured ceramic platform
for gas sensors and sensor arrays. These sensors comprise micromachined
anodic aluminum oxide films, which contains extremely high density (e.g.,
10.sup.11 cm.sup.-2) nanoscale pores. Sensing materials deposited inside
this self-organized network of nanopores have ultra-high surface area and
nanometer grain structure, therefore enabling high sensitivity. Refractory
nature of alumina ceramic enables the desired robustness, long lifetime
and stability in harsh environment. This sensor platform can been used for
both chemical gas and physical (humidity, temperature) sensors and sensor
arrays.
