A charge pump circuit includes a multiplicity of first electrodes,
insulating layers, and a multiplicity of second electrodes. The
multiplicity of first electrodes are formed at multiple locations within
one region of the substrate, wherein the multiplicity of first electrodes
are interconnected. The insulating layers are formed on/above respective
substrate regions between neighboring first electrodes, each layer
covering at least the respective substrate region. The multiplicity of
second electrodes are formed on/above the respective insulating layers,
wherein the multiplicity of second electrodes are interconnected.
