A microelectronic supercapacitor is amenable to being fabricated using micro electromechanical systems (MEMS) techniques. By utilizing MEMS techniques, the supercapacitor in accordance with the present invention can be formed with volumes <1 mm.sup.3. As such, such microelectronic supercapacitor is suitable for use in applications in which only a few millimeters are available for both a supercapacitor and an energy storage device, such as a battery.

Een micro-electronische supercapacitor is ontvankelijk voor wordt vervaardigd gebruikend micro- elektromechanische systemen (MEMS) technieken. Door technieken te gebruiken MEMS, kan supercapacitor overeenkomstig de onderhavige uitvinding met volumes worden gevormd