2,3,4,5-tetrafluorobenzene derivatives can be obtained in a particularly advantageous manner by reacting the corresponding chlorobenzene or (chloro, fluoro)-benzene derivatives with a fluorinating agent in the presence of a solvent and a catalyst at elevated temperature, which comprises carrying out the reaction initially under temperature and pressure conditions such that the respective 2,3,4,5-tetrafluoro-benzene derivative continuously distills off through a column, and subsequently setting temperature and pressure conditions such that residual fractions of the 2,3,4,5-tetrafluorobenzene derivative distill off with the corresponding 2,3,4-trifluoro-5-chloro compound.