A turbomolecular pump has rotor blades and at least one pair of electromagnets for levitating the rotor blades and for controlling one of a radial position and an axial position of the rotor. A current supplying device supplies a current to the electromagnets. A detecting device detects a current flowing through the electromagnets. A stopping device stops the supply of current to the electromagnets by the current supplying device when a duration of time during which the current detected by the detecting device exceeds a preselected current value is greater than a preselected duration of time.

 
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< Inverted peristaltic pumps and related methods

< Gas compressor comprising a double acting piston, an elongate chamber, multiple inlets mounted within heads on both sides of the chamber, and one central outlet

> Fluid apparatus such as a pump or an accumulator

> Vibratory pump

~ 00081