Disclosed is an improved electrolyte formulation for the electrodeposition of copper onto electronic devices substrates and a process using the formulation. The formulation is a solution which contains copper alkanesulfonate salts and free alkanesulfonic acids and which is intended for the metallization of micron or sub-micron dimensioned trenches or vias.

É divulgado um formulation melhorado do eletrólito para o electrodeposition do cobre em carcaças dos dispositivos eletrônicos e de um processo usando o formulation. O formulation é uma solução que contenham os sais de cobre do alkanesulfonate e livra ácidos alkanesulfonic e que é pretendida para o metallization do mícron ou trincheiras ou vias calculados as dimensões submicrónicos.

 
Web www.patentalert.com

< Powdered niobium, sintered body thereof, capacitor using the sintered body and production method of the capacitor

< Benzanilides as potassium channel openers

> Gold plating solution and plating process

> Negative-type image recording material and precursor for negative-type lithographic printing plate

~ 00081