Disclosed are spirocyclic olefin ploymers, methods of preparing spirocyclic olefin polymers, photoresist compositions including spirocyclic olefin resin binders and methods of forming relief images using such photoresist compositions.

Gegeben spirocyclic Olefin ploymers, Methoden des Vorbereitens der spirocyclic Olefinpolymer-Plastiken, Photoresistaufbau einschließlich spirocyclic Olefinharzmappen und Methoden der Formung von von Reliefbildern mit solchem Photoresistaufbau frei.

 
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> Ester compounds, polymers, resist compositions and patterning process

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