An integrated circuit and manufacturing method therefor is provided having a semiconductor substrate with a semiconductor device. A device dielectric layer is formed on the semiconductor substrate and a channel dielectric layer on the device dielectric layer has an opening formed therein. A barrier layer lines the channel opening and a conductor core fills the opening over the barrier layer. A seedless barrier layer lines the opening, and a conductor core fills the opening over the seedless barrier layer. The barrier layer is deposited in the opening and contains atomic layers of barrier material which bonds to the dielectric layer, an intermediate material which bonds to the barrier material layer and to the conductor core, and a conductor core material which bonds to the intermediate material. The conductor core bonds to the conductor core material.

 
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