A transfer system used in transferring a semiconductor from one process to another process during manufacture, and comprising first and second upper arms and first and second forearms assembled to form a frog-legs like structure, with the first and second forearms being linked to a forearm link, and a transfer hand attached to the forearm link; wherein the transfer hand is moved by associating the first upper arm motion with the first and second forearm motions, and by associating the second upper arm motion with the first and second forearm motions.

 
Web www.patentalert.com

< Transfer system

< Transfer system

> End-effector with integrated cooling mechanism

> Semiconductor integrated circuit

~ 00055