The invention provides a fast variable optical attenuator including a reflective membrane that serves as a varifocal mirror. Electrostatic deflection of the mirror defocuses the optical system and attenuates an optical signal launched to the mirror from an input port to an output port. Since the mirror is generally limited to deflections less than 1 micron, fast attenuation within a small (<5 dB) dynamic range is achieved. The dynamic range is improved by combining the fast attenuator with a slower attenuator. In the preferred embodiment, the slow and fast attenuator are not coupled via optical waveguides, but rather are optically coupled via free space or are integrated in the same device. Advantageously, this compact arrangement reduces the excess loss associated with optical fiber coupling and lowers packaging costs.

La invención proporciona un atenuador óptico variable rápido incluyendo una membrana reflexiva que sirva como espejo varifocal. La desviación electrostática de los defocuses del espejo el sistema óptico y atenúa una señal óptica lanzada al espejo de un puerto de la entrada a un puerto de salida. Puesto que el espejo se limita generalmente a las desviaciones menos de 1 micrón, atenuación rápida dentro de un pequeño (